发明名称 Photo-sensor and pixel array with backside illumination and method of forming the photo-sensor
摘要 An imaging sensor with an array of FET pixels and method of forming the imaging sensor. Each pixel is a semiconductor island, e.g., N-type silicon on a Silicon on insulator (SOI) wafer. FETs are formed in one photodiode electrode, e.g., a P-well cathode. A color filter may be attached to an opposite surface of island. A protective layer (e.g., glass or quartz) or window is fixed to the pixel array at the color filters. The image sensor may be illuminated from the backside with cell wiring above the cell. So, an optical signal passes through the protective layer is filtered by the color filters and selectively sensed by a corresponding photo-sensor.
申请公布号 US7586139(B2) 申请公布日期 2009.09.08
申请号 US20060276218 申请日期 2006.02.17
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ADKISSON JAMES W.;GAMBINO JEFFREY P.;JAFFE MARK D.;LOISEAU ALAN;RASSEL RICHARD J.
分类号 H01L31/062;H01L21/00 主分类号 H01L31/062
代理机构 代理人
主权项
地址