| 摘要 |
This invention provides a method for regulating the concentration of a developing solution, which can regulate the alkali concentration of an alkaline developing solution used in a photoresist development process so that high-quality development treatment can be carried out, and an apparatus for preparing the developing solution. In the method for regulating the concentration of a developing solution, the concentration of an alkali in the developing solution and the concentration of a carbonate in the developing solution are specified, and the alkali concentration is regulated based on a previously provided relationship between alkali concentration and carbonate concentration, which can realize such a dissolving capability that can render the CD value obtained by the development treatment constant. The apparatus for preparing a developing solution comprises a preparation tank, a feed line for feeding a developing solution to a development process, a recovery line for receiving a used developing solution, a stock solution feed line for feeding a fresh developing solution stock to the preparation tank, a concentration meter for detecting the concentration of an alkali in the developing solution and the concentration of a carbonate in the developing solution, and a control unit forcontrolling the feed of the developing solution stock based on a specific relation. |
