FABRICATION METHOD OF A POLYMER X-RAY WAVEGUIDES

摘要

A method for manufacturing a polymer X-ray waveguide is provided to generate a single mode X-ray beam using the polymer as a core of an X-ray waveguide. A multi-layer thin film is deposited on a substrate(30). The multi-layer thin film is comprised of a metal thin film(20) and an etching metal thin film(10). The etching metal thin film is deposited on a buffer metal thin film. A polymer layer(40) is coated on the multi layer thin film. The nano channel is formed by etching the etching metal thin film selectively. The liquid polymer is injected into the nano channel. The nano channel is heat-processed. A polymer nano channel core(70) is used as the core layer of the X-ray waveguide.