| 摘要 |
A vacuum device using a kiln and a vacuum method for the same are provided to prevent damage to a vacuum pump and other equipment by cooling exhaust gas of high temperature. A vacuum device using a kiln comprises a heating unit, a vacuum pump assembly line(170) and a nitrogen supply assembly line(270). The heating unit heats a container. The container is arranged inside the kiln. The heating unit is installed around the container. The vacuum pump assembly line is connected to the container. The nitrogen supply assembly line is connected to the container and supplies the nitrogen and replaces the residual gas inside the container. The kiln is composed of a main kiln(310) and a plurality of secondary kilns(320). The main kiln is exposed to the outside. The supplementary kiln is equipped inside the main kiln. In the supplementary kiln, the container is placed to be vacuumized. |
