发明名称 COATING MACHINE
摘要 <p>A coating machine is provided to improve the tact time of coating machine and to shorten the adhesion time by suction force. The substrate support unit generates the suction force in the suction hole formed in the surface of the stage(21) to absorb the substrate(10). The coating solution is discharged from the application unit while moving around the substrate. The main pipeline(51) and the connected sub piping(52) are connected to the suction force generator. The main valve for opening and closes the main pipeline is installed at the main pipeline. The subvalve is installed at the sub pipeline.</p>
申请公布号 KR20090092694(A) 申请公布日期 2009.09.01
申请号 KR20090001879 申请日期 2009.01.09
申请人 TORAY ENGINEERING CO., LTD. 发明人 MORI TOSHIHIRO;KAMATANI MANABU
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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