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发明名称
COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS
摘要
申请公布号
IL195698(D0)
申请公布日期
2009.09.01
申请号
IL20080195698
申请日期
2008.12.03
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
分类号
C09K
主分类号
C09K
代理机构
代理人
主权项
地址
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