发明名称 Method for producing a single crystal
摘要 A method for producing a single crystal by Czochralski method with pulling a seed crystal from a raw material melt, wherein in which a range of a pulling rate of pulling a single crystal, a temperature gradient at a solid-liquid interface and a highest temperature at an interface between a crucible and a raw material melt are defined. The single crystal is pulled with controlling the pulling rate and/or the temperature gradient at a solid-liquid interface within the determined range. The method produces a single crystal in which a desired defect region and/or a desired defect-free region can be determined more precisely and a single crystal with desired quality can be more surely pulled.
申请公布号 US7582159(B2) 申请公布日期 2009.09.01
申请号 US20050553754 申请日期 2005.10.18
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 IIDA MAKOTO
分类号 C30B15/10;C30B29/06;C30B15/00;C30B15/20 主分类号 C30B15/10
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