发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device is provided. The semiconductor device includes a first gate line, a second gate line, a first contact electrode, first dummy gates, a second gate pad, and a second contact electrode. The first gate line is formed on a semiconductor substrate and the second gate line of a spacer shape is formed on the sidewalls of the first gate line with a thin insulating layer interposed therebetween. The first contact electrode is vertically connected with the first gate line. The first dummy gates are formed in array spaced a predetermined interval from the first gate line on the semiconductor substrate. The second gate pad of a spacer shape is formed on the sidewalls of the first dummy gates with a thin insulating layer interposed therebetween. The second gate pad is connected to the second gate line and is also gap-filled between the first dummy gates. The second contact electrode is vertically connected with the second gate pad.
申请公布号 US7582548(B2) 申请公布日期 2009.09.01
申请号 US20060481103 申请日期 2006.07.05
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 LEE SANG BUM
分类号 H01L21/3205 主分类号 H01L21/3205
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