发明名称 I/O and power ESD protection circuits by enhancing substrate-bias in deep-submicron CMOS process
摘要 A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.
申请公布号 US7582938(B2) 申请公布日期 2009.09.01
申请号 US20050258253 申请日期 2005.10.25
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分类号 H01L29/80;H01L23/62;H01L27/02;H01L29/76 主分类号 H01L29/80
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