| 摘要 |
A method for diagnosing temporal deterioration of temperature controlling performance of an electrostatic chuck includes the steps of performing vacuum processing on the substrate wherein the substrate is adsorbed by the electrostatic chuck while a temperature control gas for controlling a temperature of the substrate is supplied between the substrate and the electrostatic chuck, and exposing, during the above step, a substrate absorbed by the electrostatic chuck to an atmosphere generated by using a processing recipe for diagnosis, detecting a temperature of the substrate. A pressure of the temperature control gas is controlled such that the detected temperature becomes a specific temperature, and the controlled pressure is stored in a storage unit. The method further includes a step of diagnosing the deterioration of the temperature controlling performance of the electrostatic chuck based on the pressure of the temperature control gas stored in the storage unit.
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