| 摘要 |
A plasma producing apparatus (10) for producing a high-voltage plasma usable for, e.g., NO oxidizing devices comprises a linear electrode (22) for generating a high voltage by resonance caused when the linear electrode (22) is supplied with an AC signal current, an earth electrode (24) for defining an internal space (24b) spaced from the linear electrode (22) and surrounding the linear electrode (22) to prevent leakage of electromagnetic waves radiated from the linear electrode (22), and a control device (40) for controlling the power feed to the linear electrode (22). The control device (40) has a field probe (30) for measuring the electric field in the internal space (24b), and a bandpass filter (44) for filtering the measurement signal into a predetermined frequency band to output an AC signal, a variable phase shifter (52) for shifting the phase of the AC signal so that the AC signal is synchronized with the resonance signal in the internal space (24b) when the AC signal is supplied to the linear electrode (22) as a current, and an amplifier (54) for amplifying the AC signal of which the phase is shifted. ® KIPO & WIPO 2009
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