| 摘要 |
A control system for semiconductor device and an establishing method of the same are provided to shorten development time by establishing semiconductor apparatus control system through an HMI(Human Man Interface) scheme. An integrated control module(200) comprises the business logic for generally controlling a plurality of control modules. A graphic interface(210) sets up tags showing the attribute of plural semiconductor devices on the graphic screen. The shared memory stores attribute which tags which are set up in the graphic interface show. A share memory management unit manages attributes stored in the shared memory. |
