发明名称 APPLICATION OF DENSE PLASMAS GENERATED AT ATMOSPHERIC PRESSURE FOR TREATING GAS EFFLUENTS
摘要 The invention concerns a system for treating gases such as PFC or HFC with plasma, comprising: (6) pumping means (6) thereof the outlet is at a pressure substantially equal to atmospheric pressure, means (8), at the pump output, to produce a plasmas at atmospheric pressure.
申请公布号 KR100914575(B1) 申请公布日期 2009.08.31
申请号 KR20037015560 申请日期 2002.05.21
申请人 发明人
分类号 C23C16/44 主分类号 C23C16/44
代理机构 代理人
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