ORGANIC/INORGANIC HYBRID PASSIVATION LAYER FOR BLOCKING MOISTURE/OXYGEN TRANSMISSION AND IMPROVING GAS BARRIER PROPERTY

摘要

An organic/inorganic hybrid thin film passivation layer and a manufacturing method thereof are provided to secure stability and reliability of an organic electronic device on a substrate by effectively blocking permeation of external oxygen and moisture. A photocurable polymer is coated on one surface or both surfaces of a plastic substrate(12) or an organic electronic device on a substrate. The photocurable polymer is selected from groups composed of epoxy resin, acryl resin, thermosetting polyimide, and polyethylene. An organic polymer passivation layer(10) is formed by curing the photocurable polymer through ultraviolet ray/ozone irradiation. An inorganic thin film passivation layer(11) is formed by depositing a nano hybrid material on the organic polymer passivation layer. The nano hybrid material includes two or more inorganic materials.