MEMS ULTRASONIC TRANSDUCER AND OBESITY CURING APPARATUS HAVING THE SAME

摘要

An MEMS ultrasonic transducer and an obesity curing apparatus having the same are provided, which focus ultrasonic wave generated in the piezoelectric element. A manufacturing process of the condenser lens array of the MEMS ultrasonic transducer comprises: a process of depositing the pattern substance on the silicon wafer(22a); a coating process of depositing the PR(photo-resistor) on the pattern substance in the fixed thickness; and a development process which forms the PR pattern by selectively melting the photosensitized part among the PR layer after performing exposure process.