| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator or the like capable of achieving stable drive and obtaining larger displacement of a vibrating plate by preventing failure caused by remanence of a piezoelectric body though it is equipped with the piezoelectric body. SOLUTION: The electrostatic actuator 100 is equipped with the vibrating plate 12 and a counter electrode 17 disposed to be opposed to the vibrating plate 12 through a predetermined gap 20, and a driving circuit 22 applying drive voltage between the vibrating plate 12 and the counter electrode 17 so as to generate electrostatic pressure, and deforms the vibrating plate 12 by the electrostatic pressure. In the electrostatic actuator 100, a piezoelectric film 101 is provided at a part of the surface of the vibrating plate 12 on the counter electrode 17 side, and also the remanence generated on the piezoelectric film 101 is eliminated by applying the drive voltage and reverse voltage whose polarity is reversed between the vibrating plate 12 and the counter electrode 17 by the driving circuit 22. COPYRIGHT: (C)2009,JPO&INPIT
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