PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, FIXING JIG, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED WATCH

摘要

This piezoelectric vibrator comprises a base substrate, a lid substrate having a recess for a cavity and joined to the base substrate with the recess being opposed to the base substrate, a piezoelectric vibrating reed so joined to the upper face of the base substrate as is housed in the cavity formed between the base substrate and the lid substrate by making use of the recess, external electrodes formed on the lower face of the base substrate, through electrodes formed through the base substrate while keeping the cavity inside gas-tight and connected electrically with the external electrodes, and routing electrodes formed on the upper face of the base substrate for connecting the through electrodes electrically with the joined piezoelectric vibrating reed. The through electrodes include cylindrical members, which are formed of a glass material into a cylindrical shape having two flat ends and a thickness substantially equal to that of the base substrate and which are buried in through holes extending through the base substrate, and electrically conductive core portions having two flat ends and a thickness substantially equal to that of the base substrate and inserted into the center holes of the cylindrical members. The through holes, the cylindrical members and the core portions are integrally fixed by sintering them.