Device for processing a workpiece using laser beams comprises a moving reflector with an adjustable pivoting angle so that the laser beams are deflected into an aperture of an F-theta objective

摘要

Device for processing a workpiece using laser beams (3a, 3b, 4a, 4b, 5a, 5b, 14) comprises a moving reflector (10) with an adjustable pivoting angle so that the laser beams are deflected into an aperture (15) of an F-theta objective (11) at different deflection angles determined by the uniform pivoting angle based on a different number of reflections on the reflector.