发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device, in which a semiconductor element mounting substrate is bonded onto an island portion of a lead frame through a silicone-based thermosetting adhesive, wherein the sticking of an outgas component of the silicone-based thermosetting adhesive on a lead portion can be stably suppressed at low cost, and high reliability can be secured in a subsequent wire bonding stage. <P>SOLUTION: When the semiconductor element mounting substrate 2 is bonded onto the island portion 1i of the lead frame 1 through the silicone-based thermosetting adhesive 3, set temperatures T2a and T2b of lead portions 1a and 1b, respectively, of the lead frame 1 are set higher than a set temperature T2i of the island portion 1i. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009194086(A) 申请公布日期 2009.08.27
申请号 JP20080032039 申请日期 2008.02.13
申请人 DENSO CORP 发明人 TOBITAKA KOMEI
分类号 H01L21/52;H01L21/60;H01L23/50 主分类号 H01L21/52
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