| 摘要 |
The invention relates to a microplasma array for producing low-temperature plasmas at or close to atmospheric pressure. According to the invention, the walls of holes which are introduced into a substrate (1) at regular intervals from each other and form hollow electrodes (2) are metal-coated, and said hollow electrodes (2) are supplied individually or in groups with electrical excitation in the GHz range from one side of the substrate (1).
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