METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO-CONTROLLED CLOCK

摘要

A method for manufacturing a piezoelectric vibrator comprises an overlapping step for overlapping a lid substrate (40) on a base substrate (50) such that a piezoelectric vibrating-reed (4) is contained in a cavity (C) after the piezoelectric vibrating-reed is bonded to the upper surface of the base substrate when the base substrate on which through electrodes (32, 33) are formed is anodically bonded to the lid substrate having a lower surface entirely coated with a bonding film (3b); a setting step for mounting a dummy material (R) composed of such a material as the internal ions can migrate at the bonding temperature on an electrode plate (J) and mounting both substrates on the dummy material by having the base substrate on the dummy material side; and an application step for applying a bonding voltage between the electrode plate and the bonding film after heating the electrode plate and the bonding film up to the bonding temperature.