| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent that a solid dielectric layer is damaged by a heat shock or the like in a plasma surface processing. <P>SOLUTION: Electrodes 11, 12 are arranged at a processing head 10, and a discharge forming face of these electrodes 11, 12 are respectively covered by the solid dielectric layers 13, 14. A temperature sensor 30 is arranged at a place corresponding to the center part of the longitudinal direction of the electrodes 11, 12, and its detected result is input into a control part 5. The control part 5 controls supply electric power from a power supply 3 based on a detected value of the sensor 30. <P>COPYRIGHT: (C)2009,JPO&INPIT |
