| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer conveyance system accessing a plurality of process devices, and to provide a wafer processor using a wafer conveyance system without the need of a load lock chamber. SOLUTION: The wafer conveyance system 10 includes: a chamber room 12 as a cylindrical space section inside a conveyance chamber 11; a plurality of chamber gates 13 for carrying in/out a wafer W to the chamber room 12 on the side face of the conveyance chamber 11; an exhaust means 23 and a supply means 24 communicated to the chamber room 12, and a conveyance robot 20 equipped with a first arm 31 configured of a disc body which occupies at least 1/2 of the capacity of the chamber room 12 in the chamber room 12. COPYRIGHT: (C)2009,JPO&INPIT
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