| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection accuracy by excluding leakage of vibration from vibrators to a device case. SOLUTION: Subvibrators 225, 245 are connected to a principal vibrator 210 through flexible internal bridge portions 221, 241, the subvibrators 225, 245 are connected to pedestals 260 through flexible external bridge portions 222, 242, and the pedestals 260 are fixed to a device case 280. Piezoelectric elements X11-X14 are fixed to the top surfaces of the internal bridge portions 221, 241. By supplying alternating voltage to a part of the piezoelectric elements, the principal vibrator 210 is vibrated, and the Coriolis force acting on the principal vibrator 210 is detected as charge generated by another piezoelectric element to obtain an angular velocity detection value. Vibration energy leaking out from the principal vibrator 210 to the device case 280 is absorbed by the motion of the subvibrators 225, 245. The vibration leakage can be reduced further by providing piezoelectric elements also on the top surfaces of the external bridge portions 222, 242, supplying alternating voltage to them, and making the subvibrators 225, 245 generate motion in a direction opposite to that of the principal vibrator. COPYRIGHT: (C)2009,JPO&INPIT
|
