| 摘要 |
PROBLEM TO BE SOLVED: To achieve the optimum inspection condition in both a memory cell region and the peripheral circuit region in the periphery of the memory cell region when the visual examination of the surface of a substrate wherein both regions are formed in a mixed state is performed. SOLUTION: Under the conditions where the first direction D1 within the surface of the substrate 2 and the second direction D2 crossing the first direction D1 at a right angle are set in a main scanning direction by rotating the substrate 2, the substrate 2 is scanned by an imaging means 14 to make it possible to mainly scan the substrate 2 along the first and second directions D1 and D2 in the regions 91a, 93a and 93b in the periphery of the indication region 90a on the surface of the substrate 2 by the imaging means 14. COPYRIGHT: (C)2009,JPO&INPIT
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