| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic induction position detector and an electromagnetic induction position detection method capable of responding to requests for high-speed response and also responding to requests for high detection accuracy. SOLUTION: A control part 12 includes first to fourth excitation power supplies 18-21 for making a first exciting current Ia=-Icos(kα)sin(ωt)+I'sin(ω't) flow through a first slider coil 15 and a second exciting current Ib=Isin(kα)sin(ωt)+I'cos(ω't) flow through a second slider coil 16; first and second filters 22 and 23 for separating an induced voltage V induced in a scale coil 17 into a first voltage Vm=KIsin(k(X-α))sin(ωt) and a second voltage Vp=K'I'sin(ω't+kX); a first arithmetic circuit 24 for determining X on the basis of the phase of Vp and outputting X as a first detected position Xp; a second arithmetic circuit 23 for determiningαat which Vm is equal to zero on the basis of Vm, outputtingαas a second detected position Xm, and adjusting Ia and Ib on the basis ofα; a signal generator 27 and the like. COPYRIGHT: (C)2009,JPO&INPIT
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