| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring apparatus which includes a simple mechanism but can precisely carry out a high-reliability shape measurement. SOLUTION: A deviation value of a sphere 200 from a reference position in an optical axis direction is measured by a position measuring means (CPU 81, position measuring program 83b4), and magnified scale factor information based on the deviation value is extracted from a compensation value memory means (compensation value data table 83a) by a magnified scale factor information extracting means (CPU 81, magnified scale factor information extracting program 83b5), based on the deviation value of the sphere 200 from the reference position in the optical axis direction measured by the position measuring means, and then one cross-section shape which is calculated by a cross-section shape calculating means (CPU 81, cross-section shape calculating program 83b1), is compensated by a cross-section shape compensating means (CPU 81, cross-section shape compensating program 83b6), based on the magnified scale factor information extracted by the magnified scale factor information extracting means. COPYRIGHT: (C)2009,JPO&INPIT
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