| 摘要 |
PROBLEM TO BE SOLVED: To provide two-pack system cleaning device which keeps the desired cleaning power of a hydrocarbon solvent and fluorine-based solvent and which allows repeated use of each solvent in the cleaning treatment of a material to be washed. SOLUTION: The fluorine-based solvent C included in a hydrocarbon solvent B is vertically separated by difference in specific gravity by cooling the hydrocarbon solvent B stored in a dipping bath 3, and the fluorine-based solvent C separated by specific gravity is separated by heating to a temperature at which the fluorine-based solvent C is evaporated and vaporized from the hydrocarbon solvent B included in the fluorine-based solvent C. The hydrocarbon solvent B from which the fluorine-based solvent is separated is returned to the dipping bath 3. Vapor Ca of the fluorine-based solvent C from which the hydrocarbon solvent B is separated is condensed and drops to a water separation tank 9 and the fluorine-based solvent C stored at the water separation tank 9 is returned to a vapor generation tank 5. COPYRIGHT: (C)2009,JPO&INPIT
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