| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress thermal expansion of a base plate even at a high temperature and prevent the distortion of support pillars which support a filament by employing a plate body made of a carbon fiber for the base plate which fixes the filament in a vacuum heating vessel. <P>SOLUTION: In a heating apparatus which accelerates thermoelectrons generated by the filament 3 in the vacuum heating vessel 1 to collide against a conductive heater 2 that constitutes one surface of the vacuum heating vessel 1, to heat the conductive heater 2, the plate body made of the carbon fiber is used for the base plate 6 which fixes the filament 3 by filament pillars 4. <P>COPYRIGHT: (C)2009,JPO&INPIT |
