GLASS MEMBER WITH OPTICAL MULTILAYER FILM AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a glass member with optical multilayer film capable of preventing the occurrence of film cracking and peeling upon the cutting or the like of an optical multilayer having a compression stress due to sputtering process or the like. SOLUTION: The glass member 1 with optical multilayer film includes: a glass substrate 2; and an optical multilayer film 4 which is formed via an attachment force strengthening layer 3 on a principal surface 2a of the glass substrate 2 and has a compression stress. The attachment force strengthening layer 3 has a thickness of≥50 nm and is made of silicon oxide film having a compression stress. COPYRIGHT: (C)2009,JPO&INPIT