| 摘要 |
PROBLEM TO BE SOLVED: To improve the blowoff surface temperature distribution of a fan filter unit. SOLUTION: In the fan filter unit, the upper part of a box-shaped chamber 5 is provided with a suction part 1, a fan unit 4 including a fan 2 and a motor 3 is built in the chamber 5, and a filter 6 is fitted to the blowoff side of the fan unit 4. In the structure of the fan filter unit, the motor 3 is fixed to the chamber 5 by a motor support 7, and a flat plate 8 is fitted to the motor support 7 to cover the bottom of the motor 3. By the means, heat generated from the motor 3 is interrupted so that the temperature can be restrained from being elevated only at the central part on the blowoff side. COPYRIGHT: (C)2009,JPO&INPIT |
