发明名称 METHOD OF MANUFACTURING SOLID-STATE IMAGE PICKUP ELEMENT, AND SOLID-STATE IMAGE PICKUP ELEMENT
摘要 Disclosed herein is a method of manufacturing a solid-state image pickup element, the method including the steps of forming a plurality of photoelectric conversion elements within a semiconductor substrate; forming a wiring layer via an insulating film on a surface of the semiconductor substrate in which surface the plurality of photoelectric conversion elements are formed; laminating a supporting substrate to a surface of the semiconductor substrate in which surface the wiring layer is formed via an adhesive; applying a pressure to the semiconductor substrate and the supporting substrate in a state of the semiconductor substrate and the supporting substrate being laminated to each other via the adhesive; and curing the adhesive by heating the adhesive to a curing temperature of the adhesive after releasing the applied pressure.
申请公布号 US2009212384(A1) 申请公布日期 2009.08.27
申请号 US20090364254 申请日期 2009.02.02
申请人 SONY CORPORATION 发明人 KOBAYASHI HIDEKI;MURAMATSU MASAFUMI
分类号 H01L27/146;H01L21/50;H01L27/14;H04N5/335;H04N5/369;H04N5/374 主分类号 H01L27/146
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