| 摘要 |
A semiconductor device includes a semiconductor substrate having a first element isolation trench with a first opening width and a second element isolation trench with a second opening width larger than the first opening width, the first and second element isolation trenches having respective inner surfaces, the second element isolation trench having opposed sidewalls and bottom, a first element-isolating insulation film formed on the inner surfaces of the first and second element isolation trenches, a second element-isolating insulation film formed on the first element-isolating insulation film so as to fill the first element isolation trench and further formed on the first element-isolating insulation film formed on the sidewall of the second element isolation trench, and a third element-isolating insulation film provided on the second element-isolating insulation film and the first element-isolating insulation film formed on the bottom of the second element isolation trench, so as to fill the second element isolation trench.
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