| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma reactor for bimodal operation, a plasma reactor which, with a simple operation, adjusts a power applicable in accordance with contamination characteristic of a different cleaning object, converts a discharge mode and cleans effectively, as well as saves electric power and reduces cost. <P>SOLUTION: The plasma reactor is at least equipped with a gas whirling empty chamber having two gas input ports, a first electrode installed in the gas chamber, a second electrode installed in the gas chamber to deal with the first electrode, an insulated isolation layer installed between the first and the second electrode, a magnetic field generator installed outside the first electrode, and a gas input buffer chamber installed outside the gas whirling empty chamber. In addition, there is a high voltage power supply which is electrically connected to the first and the second electrode. By gaseous discharge, non-thermal plasma is generated in the gas whirling empty chamber and jetted with an air stream from an exit to clean the surface of an object. <P>COPYRIGHT: (C)2009,JPO&INPIT |
