| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspecting apparatus which solves such problems of damaging a substrate component, causing an examining staff etc. to get an electricshock and the like, by preventing a target substrate from being taken out until a residual voltage and a residual charge of the target substrate become equal to or less than a certain level. SOLUTION: The target substrate is moved up along with a pin board by rotating a lever 4, and then a probe pin is brought to contact with a test point to turn on electricity, thereby conducting an operation test of the target substrate. After completing the test, a downward rotation of a rotation block 14, i.e., the rotation of the lever 4 is prevented mechanically by using a pin 19 of a solenoid lock 18, until an accumulated charge of an electrolytic capacitor contained in the target substrate is decreased. Since the accumulated charge of the electrolytic capacitor becomes low after an elapse of a certain time, the solenoid lock 18 is turned off, and the pin 19 is brought to return to its immersed state. Then, the pin board is moved down to return to its waiting position by rotating the lever 4 in its upward direction, and a top plate is opened in order to take out the target substrate. COPYRIGHT: (C)2009,JPO&INPIT
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