| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of making errors in the dimension correction of a loading effect smaller. SOLUTION: A resizing apparatus 300 includes: an area density calculation unit 10 configured to calculate a first area density occupied by a pattern of a first dimension in a mesh region; a dimension error calculation unit 12 configured to calculate a first dimension error caused by a loading effect, on the basis of the first area density; a dimension calculation unit 14 configured to calculate a second dimension for which the first dimension error is corrected; an area density calculation unit 16 configured to calculate a second area density occupied by the pattern of the second dimension; a dimension error calculation unit 18 configured to calculate a second dimension error caused by the loading effect, on the basis of the second area density; a dimension calculation unit 20 configured to calculate a third dimension by adding the second dimension error to the second dimension; a determination unit 22 configured to determine whether a difference between the first dimension and the third dimension is within an allowable range or not; and a resizing processing unit 26 configured to output the pattern of the second dimension in which the difference is within the allowable range. COPYRIGHT: (C)2009,JPO&INPIT
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