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发明名称
Vorrichtung und Verfahren zur Messung der Dielektrizitätseigenschaften in Halbleiterwafer
摘要
申请公布号
DE602004022012(D1)
申请公布日期
2009.08.27
申请号
DE200460022012T
申请日期
2004.12.21
申请人
SOLID STATE MEASUREMENTS INC.
发明人
HOWLAND, WILLIAM H. JR.;KALNAS, CHRISTINE E.
分类号
G01R27/26;H01L21/66;G01R31/28;G01R31/312
主分类号
G01R27/26
代理机构
代理人
主权项
地址
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