| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinder improving the follow-up capability for a grinding surface of a retainer ring provided along a circumference of a top ring for holding a substrate to hold an outer periphery of the substrate, and applying a desired retainer ring surface pressure to the grinding surface. <P>SOLUTION: The grinder is provided with: a grinding table 100 having the grinding surface 101a; a top ring body 2 having a pressure chamber to which a pressure fluid is supplied, for pressing the substrate against the grinding surface 101a by a fluid pressure by supplying the pressure fluid to the pressure chamber; and a retainer ring 3 provided along the circumference of the top ring body 2 and vertically movably provided independently from the body 2 to press the grinding surface 101a. A fulcrum O which receives lateral force applied from the substrate to the retainer ring 3 during grinding the substrate is positioned above the center of the substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT |
