发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a technology for improving production yield and product reliability in a semiconductor device having a triple-well structure. SOLUTION: The semiconductor device includes an n-channel type field effect transistor 254n formed in a p-type well 252 in a deep n-type well 200 formed in a p-type substrate 1, and a p-channel type field effect transistor 254p formed in a shallow n-type well 251. An inverter circuit INV1 that does not contribute to circuit operation is formed. A shallow p-type well 252 is connected to the substrate 1 using a first interconnect 253(M1). The gate electrode of a p-channel type field effect transistor 254p and n-channel type field effect transistor 254n are connected to a shallow n-type well 251 using an uppermost interconnect 255(M8). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009194369(A) 申请公布日期 2009.08.27
申请号 JP20080311085 申请日期 2008.12.05
申请人 RENESAS TECHNOLOGY CORP 发明人 FUJII MASAKO;OBAYASHI SHIGEKI;MORINO NAOZUMI;HIRAIWA ATSUSHI;WATARAI SHINICHI;YOSHIDA TAKESHI;KOSHIHISA KAZUTOSHI;SUGIYAMA MASAO;KONDO YOSHINORI;EGAWA YUICHI;KANEKO YOSHIYUKI
分类号 H01L21/8238;H01L21/3205;H01L21/822;H01L21/8234;H01L23/52;H01L27/04;H01L27/06;H01L27/092 主分类号 H01L21/8238
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