| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool state detection device detecting falling of a bonding tool with no cost increase. SOLUTION: The bonding tool is lowered toward an upper surface of a side wall of a feeder rail by a bonding head. When the tool lands, a landing sensor outputs a land signal to a controller. The controller stores a coordinate value indicative of the level of the bonding head in a storage means as a reference height. In inspection, the bonding tool is lowered toward the side wall upper surface of the feeder rail, and when the tool lands, the landing sensor outputs the land signal to the controller. The controller detects the coordinate value of the bonding head as an inspection height and compares the inspection height with the reference height to decide the state of the bonding tool according to its change amount (S4). COPYRIGHT: (C)2009,JPO&INPIT
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