| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin injection apparatus where an airtight tank is not contaminated with resin. SOLUTION: The resin injection apparatus 100 is provided with the airtight tank 110 having a work region which is airtightly blocked, a container 140 storing liquid-like resin in the work region and a holding part 130 holding a pair of substrates in an overlapped state. In the work region, at least a part of confronting faces of the pair of substrates held by the holding part 130 is brought into contact with resin, and resin is injected into a part between the confronted faces. At least a surface of the holding part 130 is formed of a material having thermal conductivity equal to or smaller than that of resin. The holding part 130 can be formed of resin or can be formed of resin having a composition which is the same as resin. COPYRIGHT: (C)2009,JPO&INPIT
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