| 摘要 |
PROBLEM TO BE SOLVED: To provide a rack for an evacuation treatment capable of supporting hollow panels at small intervals for enhancing production efficiency. SOLUTION: In this rack 1 for an evacuation treatment including: support members 7 supporting the plurality of hollow panels 2; and a plurality of exhaust heads 11 having chip tubes 10 mounted to openings of the respective hollow panels 2 respectively inserted therein, and respectively exhausting gas from the respective hollow panels 2 through the chip tubes 10, the exhaust heads 11 are alternately serially arranged in the insertion direction of the chip tubes 10 by being alternately shifted in the direction orthogonal to the insertion direction of the chip tubes 10 and the direction for inserting the hollow panels 2. COPYRIGHT: (C)2009,JPO&INPIT
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