| 摘要 |
PROBLEM TO BE SOLVED: To obtain an interference microscope image of a multi-stage electron beam biprism by an electromagnetic lens system with the same number as the one-stage electron beam biprism without drop of operation flexibility of the multi-stage electron beam biprism. SOLUTION: An upper-stage electron beam biprism is arranged at further upstream side in a progress direction of an electron beam than a specimen, and an image of the electron beam biprism is formed on the specimen (on an object plane) with the use of an imaging action of an upstream side magnetic field of an objective lens. Then, a double-biprism interference optical system is constructed of a lower-stage electron beam biprism arranged downstream side of the objective lens up to the first image plane of the specimen. No new electromagnetic lens needs to be added in this optical system. COPYRIGHT: (C)2009,JPO&INPIT
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