A paddle for the production of semiconductor wafers is provided. The paddle can be a cantilever paddle made of a ceramic such as silicon carbide and can be used with round or square wafers, such as photovoltaic wafers. The paddle exhibits excellent deflection and strength characteristics.
申请公布号
US2009214999(A1)
申请公布日期
2009.08.27
申请号
US20090389741
申请日期
2009.02.20
申请人
SAINT-GOBAIN CERAMICS & PLASTICS, INC.
发明人
KAEMPFE SCOTT A.;KENNEY MICHAEL P.;DWYER KAREN A.;ZHANG PENG
