发明名称 SEMICONDUCTOR DEVICE WITH CAPACITOR AND FUSE, AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device with a capacitor and a fuse, and a method for manufacturing the same are described. The semiconductor device comprises a semiconductor substrate having a capacitor region and a fuse region defined therein, a insulating layer over the semiconductor substrate, a storage node hole formed in the insulating layer, a barrier metal in the storage node hole, a dielectric layer formed on the barrier metal and the insulating layer, a lower metal layer for a plate electrode filling the storage node hole such that it is flush with the dielectric layer, an upper metal layer for the plate electrode on the dielectric layer and lower metal layer for the plate electrode; and a fuse metal layer formed of the same material as that of the upper metal layer for the plate electrode on the dielectric layer in the fuse region.
申请公布号 US2009212389(A1) 申请公布日期 2009.08.27
申请号 US20090433539 申请日期 2009.04.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHEOL ROH IL
分类号 H01L23/525 主分类号 H01L23/525
代理机构 代理人
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