发明名称 POLYMER COMPOUND
摘要 <p>Provided is a polymer compound that is a photoresist composition able to form photoresist films having excellent acid reactivity and thermal stability, minimal swelling during development, and a refractive index at a 193 nm wavelength of preferably 1.72 or higher, and that is for obtaining photoresist compositions able to be patterned as photoresist films, and that has the below compound as at least one of the starting materials.</p>
申请公布号 WO2009104717(A1) 申请公布日期 2009.08.27
申请号 WO2009JP52971 申请日期 2009.02.20
申请人 KURARAY CO., LTD.;JSR CORPORATION;NAKAYAMA, OSAMU;FUKUMOTO, TAKASHI;KAWAKAMI, TAKANORI;SUGIURA, MAKOTO;KUSUMOTO, SHIRO 发明人 NAKAYAMA, OSAMU;FUKUMOTO, TAKASHI;KAWAKAMI, TAKANORI;SUGIURA, MAKOTO;KUSUMOTO, SHIRO
分类号 C08F20/38;C07D339/08;G03F7/039;H01L21/027 主分类号 C08F20/38
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