DARK-FIELD EXAMINATION DEVICE

摘要

The present invention relates to a dark-field examination device.  The dark-field examination device according to the present invention is characterised in that it comprises: an illumination unit for irradiating light towards an examination object on a base; a reflection unit for reflecting, back towards the examination object, incident light which has been reflected by means of the examination object or incident light which has passed through the base; and an imaging unit for imaging the examination object by receiving light which has been scattered by means of the examination object, and in that the illumination unit, the reflection unit and the imaging unit are arranged in such a way that part of the light which has been irradiated from the illumination unit is scattered by means of the examination object and falls incident upon the imaging unit while another part of the light which has been irradiated from the illumination unit falls incident upon the reflection unit, and the light reflected back towards the examination object by means of the reflection unit is scattered by means of the examination object and falls incident upon the imaging unit.