| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative radiation-sensitive resin composition which can suppress indentation of a resist pattern and resist cracking by plating stress at a plating step and accurately form thick platings, even when descumming (O<SB>2</SB>plasma ashing) treatment is performed as pretreatment for plating, and which is excellent in resolution and adhesion. <P>SOLUTION: The negative radiation-sensitive resin composition comprises (A) a copolymer having a specific structural unit, (B) a crosslinking agent comprising (b1) a compound having a structural unit of formula (3) or (b2) a compound of formula (4), (C) a radiation-sensitive radical polymerization initiator, and (D) an organic solvent. <P>COPYRIGHT: (C)2009,JPO&INPIT |
