| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition or the like having excellent photosensitive characteristics such as high resolution and high sensitivity. <P>SOLUTION: The positive photosensitive resin composition contains: (A) a polyimide precursor where part of a hydroxyl group contained in a molecule is substituted by a group represented by general formula (I); and (B) a compound having a quinone diazide structure. In the formula, R<SP>1</SP>, R<SP>2</SP>and R<SP>3</SP>may be the same or different and each represent a substituted or unsubstituted alkyl, a substituted or unsubstituted aryl or a substituted or unsubstituted aralkyl, or R<SP>1</SP>and R<SP>2</SP>may form a cycloalkyl together with adjacent carbon atoms, or R<SP>2</SP>and R<SP>3</SP>may form an oxygen-containing heterocycle together with adjacent C-C-O. <P>COPYRIGHT: (C)2009,JPO&INPIT |
