| 摘要 |
PROBLEM TO BE SOLVED: To reliably maintain airtightness in a cavity, and to ensure stable continuity between a piezoelectric vibration piece and an external electrode. SOLUTION: A piezoelectric vibrator is provided with a base substrate 2 with both surfaces polished; a lid substrate 3 provided with a recess 3a for a cavity and jointed to the base substrate with the recess opposed to the base substrate; the piezoelectric vibration piece 4, stored in the cavity formed between both substrates and jointed to the upper surface of the base substrate; a pair of external electrodes 38, 39 formed on the lower surface of the base substrate; a pair of through electrodes 32, 33 so formed through the base substrate as to maintain airtightness in the cavity, and is electrically connected to a pair of external electrodes, respectively; and guidance electrodes 36, 37 formed on the upper surface to the base substrate, to electrically connect the pair of through-electrodes to the jointed piezoelectric vibration piece. In the piezoelectric vibrator 1, the through-electrodes are formed by curing of a paste which contains a plurality of metal particulates. COPYRIGHT: (C)2009,JPO&INPIT
|
